Manipulator

Installation flange:  DN63CF

Baking temperature:  130℃

Temperature:  Equipped with a cold and hot platform, capable of temperature variation from 90K to 1500K

Sample heating method:  DC heating, radiation heating, E-beam heating

Maximum stroke:  Z direction 700mm，The accuracy of the Z moving module is50μm

Adjustable angle:  360 ° around the axial direction, with a controllable accuracy of 0.25 °

XY stroke:  ±15mm、The accuracy of the X/Y direction moving module is 15 μ M