The minimum temperature of the scanning head can reach 8K;
Thermal drift in XY direction ＜ 0.1nm/h, Z-direction ＜ 0.01nm/h;
STM mode: T ≤ 10K, can obtain Au (111) or Si (111) 7 × 7 Surface atomic images
NC AFM mode: T ≤ 10K, can achieve NaCI, metal single crystal atomic resolution
Z noise<2pm; Current noise<2pA (@ 8K);
AFM frequency noise<100mHz;
System limit vacuum ≤ 2.0 × 10-10mbar
XYZ coarse motion range: 4mm × 4mm × 8mm;
XYZ scanning range: 10μm×10μm×1.5μm（T=300K）；
1.8μm×1.8μm×0.2μm（T=8K）
Various SPM measurements within the temperature range of 8K-300K
When the refrigeration system is turned on, the acoustic noise is ≤ 50db
Atomic force microscopy (AFM) module is configured to realize scanning tunnel Spectroscopy (STM) image, scanning tunnel Spectroscopy (STS), non-contact Atomic force microscopy image and force spectrum measurement, surface atom manipulation and other functions.
Configure a pre-treatment chamber to achieve sample annealing and ion sputtering pre-treatment;
Configure the evaporation source to achieve sample evaporation plating.
UHV-LT-STM/Nc— AFM
MBE-500
Environmental System（RT—STM/Nc—AFM）
RHEED System
MBE-250
Sample Storage Rack
Low Temperature Dewar
Evaporator-DH
Gas Path
Wobble Stick
Manipulator
STM Tip Holder